Jun 15, 2018   SOURCE: BusinessWire

BISTel’s Intelligent Chamber Matching Application Creates “Golden Chamber” to Help Semiconductor Manufacturers Maximize Fleet Performance

BISTel, a leading provider of intelligent, real-time data management, advanced analytics and predictive solutions for smart manufacturing announced today an innovative new Chamber Matching™ (CM) application that conducts time based, chamber analysis, and is capable of comparing an unlimited number of chambers simultaneously to identify the best performing chamber or golden chamber. Once CM has identified the golden chamber, manufacturers can then match all chambers parameters to the golden chamber parameters to optimize fleet performance and better guard against events that impact yield.

For semiconductor wafer manufacturers, optimizing wafer chamber performance is critical to ensuring high quality, high yield wafers. For customers to achieve this goal and maximize the performance of their fleet, analyzing variations in chamber performance and quickly recognizing which parameters are changing over time is critical to assuring the maximum possible yield from each chamber. BISTel’s new Chamber Matching (CM) application enables customers to quickly determine the best performing chamber – referred to as the golden chamber. Customers then compare the reference chamber to all other chambers to help improve fleet performance.

According to James Bird, Data Science Manager, Data Engineering & Analytics, Team Manufacturing IT, NXP Semiconductor, “BISTel’s Chamber Matching (CM) provides a method to quickly and quantitatively compare the FDC signatures between processing tools. Their full trace analytics algorithms allow us to extract valuable insights from our FDC trace data that might otherwise go unseen.”

“CM is the second of four exciting new intelligent manufacturing solutions we have introduced to the market, and that will have an immediate impact on our customers wafer quality and yield,” noted W.K. Choi, Founder and CEO, BISTel. “With these advanced data analysis tools, we can perform quickly identify the golden chamber and provide our customers the opportunity to improve the performance of their equipment and processes.”

Key Features and Benefits

BISTel’s new Chamber Matching (CM) solution quickly identifies mis-matching and drifting sensors and it can analyze an unlimited number of chambers simultaneously. In addition, CM:

  • Improves quality and yield
  • Executes statistical analysis to quickly identify the best performing chamber or “golden chamber”
  • Performs full trace analysis on all sensors and ranks chambers and parameters worse to best
  • Let’s customers easily conduct time-based, chamber performance analysis
  • An ideal solution to help qualify tool during tool bring-up after a PM
  • CM is completely FDC system independent

About BISTel

BISTel, a leading provider of intelligent, real-time data collection and management, advanced analytics and predictive solutions for smart manufacturing. To learn more visit bistel.com