Sumitomo Heavy Industries: “Vacuum Air Servo” Webinar Video Broadcast on Unique Air Pressure Technology

Sumitomo Heavy Industries, Co. Ltd (TOKYO:6302) (headquarters located in Tokyo, Japan, Shinji Shimomura CEO) has released the webinar video. The theme is “Vacuum Air Servo”, which enables positioning at a nano level.

This press release features multimedia. View the full release here:


Webinar Video now available

Chip miniaturization is accelerating in the semiconductor industry due to technological innovations such as 5G and autonomous driving.

At Sumitomo Heavy Industries, Co. Ltd, we developed the Vacuum Air Servo Stage for high precision devices, which is a new technology developed in Japan that enables world-class high-precision manufacturing.

Instead of conventional motor method with the Vacuum Air Servo Stage, we use air pressure as a driving force in vacuums using our proprietary air pressure control technology to achieve nano-level positioning.

All the motion and mechanism are introduced in the webinar video. Please enjoy.

About us

Company: Sumitomo Heavy Industries, Co. Ltd
Location: ThinkPark Tower, 2-1-1 Osaki Shinagawa-ku, Tokyo, Japan
President & CEO: Shinji Shimomura
Established: 1st of Nov, 1934

[Business description]
- Design, manufacture and sale of precision machine control equipment, electrical and electronic equipment and its application systems and various industrial control systems
- Software development and sales

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